QUANTITATIVE ESTIMATION OF PHYSICAL PROCESSES AT A CONTACTLESS SCANNING MICROWAVE MICROSCOPY

Abstract
Electromagnetic properties of resonator probes with coaxial measuring aperture, which are widely used in scanning microwave microscopy (SММ), are studied in this paper. Quantitative estimations of dependence of the dimensions of near-field localization and the spatial distribution of its components upon the aperture geometry, shape of the point and the size of the air gap between the object and the aperture of the resonator measurement sensor (RMS) are determined. The influence of the gap upon electromagnetic properties and characteristics of the system «microwave probe – air gap – object» is also investigated. It is demonstrated that availability of the gap exerts a substantial influence upon the value of spatial resolution of the microprobes and results in essential loss of sensitivity by the microwave sensor of the SMM. The obtained results might serve as the basis for the general theory of resonator microprobes with coaxial measuring aperture for SMM semiconductors and dielectrics possessing sub-micron resolution values.

KEY WORDS: scanning microwave microscopy, resonator measurement transducer, probe, aperture, Q-factor, resonant frequency, field distribution, sensitivity, spatial resolution

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