ELECTROMAGNETIC PROPERTIES OF RESONATOR MICROPROBE FOR THE SCANNING MICROWAVE MICROSCOPY

Abstract
This paper studies the electromagnetic properties of resonator probes with a coaxial measuring aperture that are widely used for the scanning microwave microscopy (SMM). The quantifications of localization sizes of the near-field and spatial distribution of its electric components as a function of aperture geometry and probe point shape have been established. The dependence of Q-factor and resonance frequency of the probes on aperture geometry, point shape and electric parameters of an object has been studied for the semiconductor and dielectric objects. It has been shown that the spherical shape of a probe point improves considerably the spatial resolution of probes and it does not lead to the substantial degradation of their sensitivity.
KEY WORDS:scanning microwave microscopy, resonator measuring transducer, probe, object, aperture, Q-factor, resonance frequency, field distribution, sensitivity, spatial resolution

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