TELECOMMUNICATIONS AND RADIO ENGINEERING - 2009 Vol. 68,
No 15 		 

 

 

 

Resonance Method for Thickness Determinant of Vacuum Evaporated Thin Films

A.V. Kuzmin, V.E. Semenenko, A.S. Posuhov, and N.G. Stervoedov
V. Karazin National University of Kharkiv, 4, Svoboda Sq., Kharkiv, 61077, Ukraine

Abstract
This paper deals with the methods of thickness measurement of the coated film by means of a quartz sensor. It has been found that the continuous control of thickness of thin films in the range of 10 to 100 nm can be exercised by the resonance method. The structure of nickel films and their thickness dependence on the resonance frequency of quartz crystal have been obtained and presented graphically.

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pages 1391-1398

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